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The NMT04 NanoMechanical Testing System stands at the forefront of in-situ SEM/FIB nanoindentation technology. Leveraging FemtoTools' exclusive MEMS technology, it provides unmatched precision for analyzing materials on the micro- and nanoscale.
With MEMS-based force sensors, the NMT04 boasts exceptional resolution, repeatability, and dynamic response. This system is ideal for nanoindentation of metals, ceramics, thin films, and micro-scale structures like metamaterials and MEMS. It features expandable capabilities via accessories for diverse research fields.
It excels in applications such as micro-compression testing, tensile testing of thin films or nanowires, and fracture testing of micro-beams. This provides precise quantification of plastic deformation, crack growth, and fracture toughness. Its compact design fits most commercial SEMs, enabling comprehensive correlative analysis with techniques like EBSD and EDX.
Micro-Electro-Mechanical System (MEMS)-based force sensors have an unmatched dynamic range of up to 100 kHz, thanks to their exceptionally small mobile mass and high stiffness. Moreover, the fine fabrication tolerances of MEMS achieve the lowest possible noise floor, reaching down to 500 pN.
up to100 kHz |
down to 500pN |
|
| Resonance frequency | Force noise floor |
Displacement-controlled nanoindentation is essential for measuring and comparing mechanical properties at consistent indentation depths, ensuring the probing of equivalent material volumes.
Inherently Displacement Controlled | ||
| Control mode |
The NMT04 is specially-designed to work seamlessly with Electron Backscatter Diffraction (EBSD) or Scanning Transmission Electron Microscopy (STEM) detectors inside the SEM. Its open measurement frame enables simultaneous observation and analysis of the evolution of the microstructure of the sample during mechanical testing.
Nanoindentation assesses the local mechanical behavior of a material by pressing a sharp tip into its surface and measuring the force needed to create an indent. This technique measures local mechanical properties (including hardness, elastic modulus, strain rate sensitivity, and others) directly from the material's response.
Nanoindentation mapping, or mechanical microscopy, employs a nanoindenter in a microscope-like manner. It enables the mapping of mechanical properties of intricate microstructures in minutes, thanks to the integration of rapid indentation speeds and precise spatial resolution.
Correlative mechanical microscopy merges nanoindentation with additional microscopy methods. This integration of various data layers enables precise phase identification by including elemental or crystallographic analysis in the mechanical measurement.
Time, like temperature, is a key parameter for materials deformation. Speed determines the active deformation mechanism. Strain-rate control during testing achieves the most consistent results and allows exploring the material's response from creep to impact, even within a single indent.
Temperature changes the mechanical behavior of materials. It is crucial for assessing operando mechanical properties, under conditions close to their target application. Using precision MEMS heating to achieve rapid temperature matching and thermal control, stable measurements can be performed even at high temperatures.
Polymers, metamaterials, or bio-inspired materials are critical for modern technologies. Analysis of these soft materials requires systems capable of both large displacements and high force resolution.
The FT-S Microforce Sensing Probes are sensors capable of measuring forces from sub-nanonewton to 2 newtons along the sensor’s probe axis. They are available with a wide variety of tip materials and geometries, including diamond Berkovich, cube corner, flat punch, wedge, conical, and more.
Combining an exchangeable sample stage with a piezoscanner and a FemtoTools 2-Axis Microforce Sensing Probe enables advanced techniques, such as nano-scratch and nano-wear testing, as well as SPM imaging, by facilitating the in-plane movement of the sample while simultaneously applying a normal force.
The high-temperature module enables mechanical testing, such as nanoindentation, micro-pillar compression, micro-cantilever bending, micro-tensile testing at controlled temperatures up to 800°C. In combination with our microforce sensing probes featuring tip heating, controlled isotherm testing is possible.
This MEMS-based Tensile Testing Chip consists of a movable body that is suspended by four flexures within an outer, fixed frame. It enables the tensile testing of samples thin enough to be electron-transparent, allowing for simultaneous imaging with Scanning Transmission Electron Microscopy (STEM) or Transmission Kikuchi Diffraction (TKD).
The rotation stage permits the rotary alignment of samples to the indenter tip, making it possible to test multiple samples in one session by using the rotation stage as a sample revolver. Additionally, it simplifies correlative nanomechanical testing by allowing the sample to be rotated easily between the indentation and imaging positions.
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